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The electrostatic-alloy bonding technique used in MEMS

WANG Wei, CHEN Wei-ping

《机械工程前沿（英文）》 2006年 第1卷 第2期   页码 238-241 doi: 10.1007/s11465-006-0011-5

摘要： Electrostatic-alloy bonding of silicon wafer with glass deposited by Au to form Si/Au-glass water, and bonding of Si/Au-glass with silicon wafer were researched during fabrication of pressure sensors. The silicon wafer and glass wafer with an Au film resistor were bonded by electrostatic bonding, and then Si-Au alloy bonding was formed by annealing at 400vH for 2 h. The air sealability of the cavity after bonding was finally tested using the N filling method. The results indicate that large bond strength was obtained at the bonding interface. This process was used in fabricating a pressure sensor with a sandwich structure. The results indicate that the sensor presented better performances and that the bonding techniques can be used in MEMS packaging.

关键词： Si/Au-glass     strength     MEMS packaging     process     sandwich structure    

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Ultraviolet exposure enhanced silicon direct bonding

Guanglan LIAO, Xuekun ZHANG, Xiaohui LIN, Canghai MA, Lei NIE, Tielin SHI,

《机械工程前沿（英文）》 2010年 第5卷 第1期   页码 87-92 doi: 10.1007/s11465-009-0078-x

摘要： Ultraviolet (UV) exposure, as an additional technique following the traditional wet chemical activation processes, is applied to enhance hydrophilic silicon direct bonding. The effects of UV exposure on silicon wafers’ nano-topography and bonding strength are studied. It is found that the surface roughness of silicon wafers initially decreases and then increases with UV exposure time, and the bonding strength increases and then decreases accordingly. The correlations of annealing temperature and annealing time vs. bonding strength are experimentally explored. Results indicate that the bonding strength increases sharply then gently with increasing annealing temperature and annealing time using UV exposure. Besides, the reliability of silicon direct bonding with UV exposure enhancement after the high/low temperature cycle test, constant temperature and humidity test, vibration test and shock test is investigated. It follows from the results that the bonding strength of silicon wafer pairs with UV exposure decreases after the environmental tests, whereas the residual strength is still higher than that without UV exposure, and the variation trends of bonding strength vs. UV exposure time, annealing temperature and annealing time remain unchanged. Therefore, following the traditional wet chemical activation processes, appropriate UV exposure (about three minutes in this study) is effective and promising to enhance silicon direct bonding.

关键词： ultraviolet (UV) exposure     silicon direct bonding     bonding strength     reliability    

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Patterned wafer bonding using ultraviolet adhesive

Rui ZHUO, Guanglan LIAO, Wenliang LIU, Lei NIE, Tielin SHI

《机械工程前沿（英文）》 2011年 第6卷 第2期   页码 214-218 doi: 10.1007/s11465-011-0130-5

摘要：

The process of patterned wafer bonding using ultraviolet (UV) adhesive as the intermediate layer was studied. By presetting the UV adhesive guide-layer, controlling the thickness of the intermediate layer (1– 1.5 μm), appropriate pre-drying temperature (60°C), and predrying time (6 min), we obtained the intermediate layer bonding of patterned quartz/quartz. Experimental results indicate that patterned wafer bonding using UV adhesive is achieved under room temperature. The process also has advantages of easy operation, low cost, and no plugging or leakage in the patterned area after bonding. Using the process, a microfluidic chip for red blood cell counting was designed and fabricated. Patterned wafer bonding using UV adhesive will have great potential in the fabrication of microfluidic chips.

关键词： ultraviolet (UV) adhesive     intermediate layer     patterned wafer bonding    

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A space solar cell bonding robot

FU Zhuang, ZHAO Yan-zheng, LIU Ren-qiang, DONG Zhi

《机械工程前沿（英文）》 2006年 第1卷 第3期   页码 360-363 doi: 10.1007/s11465-006-0027-x

摘要： A space solar cell bonding robot system which consists of a three-axis Cartesian coordinate s robot, coating device, bonding device, orientation plate, and control subsystem was studied. A method, which can control the thickness o

关键词： Cartesian coordinate     thickness     three-axis Cartesian     orientation     control subsystem    

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淀粉基API胶合木胶接结构破坏模式及失效机理

时君友,徐文彪,王淑敏

《中国工程科学》 2014年 第16卷 第4期   页码 40-44

摘要：

以淀粉基水性高分子异氰酸酯（API）胶合木胶接结构为研究对象，以胶接的压缩剪切强度为评估指标，通过加速湿热老化试验对胶接结构的破坏模式和失效机理进行了研究。结果表明：胶接结构的断裂性质为韧性断裂，且随着老化时间的增加，其破坏模式为由内聚破坏向内聚破坏+界面破坏转变。在湿热老化试验前期温度对压缩剪切试样性能起主要作用，在老化后期湿度起主要作用。

关键词： 胶接结构     加速湿热老化     断裂性质     破坏模式    

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Towards Cr(VI)-free anodization of aluminum alloys for aerospace adhesive bonding applications: A review

Shoshan T. Abrahami, John M. M. de Kok, Herman Terryn, Johannes M. C. Mol

《化学科学与工程前沿（英文）》 2017年 第11卷 第3期   页码 465-482 doi: 10.1007/s11705-017-1641-3

摘要： For more than six decades, chromic acid anodizing (CAA) has been the central process in the surface pre-treatment of aluminum for adhesively bonded aircraft structures. Unfortunately, this electrolyte contains hexavalent chromium (Cr(VI)), a compound known for its toxicity and carcinogenic properties. To comply with the new strict international regulations, the Cr(VI)-era will soon have to come to an end. Anodizing aluminum in acid electrolytes produces a self-ordered porous oxide layer. Although different acids can be used to create this type of structure, the excellent adhesion and corrosion resistance that is currently achieved by the complete Cr(VI)-based process is not easily matched. This paper provides a critical overview and appraisal of proposed alternatives to CAA, including combinations of multiple anodizing steps, pre- and post anodizing treatments. The work is presented in terms of the modifications to the oxide properties, such as morphological features (e.g., pore size, barrier layer thickness) and surface chemistry, in order to evaluate the link between fundamental principles of adhesion and bond performance.

关键词： aluminum     Cr(VI)-free     surface pre-treatments     anodizing     adhesive bonding    

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ARC welding method for bonding steel with aluminum

Zhenyang LU, Pengfei HUANG, Wenning GAO, Yan LI, Hanpeng ZHANG, Shuyan YIN

《机械工程前沿（英文）》 2009年 第4卷 第2期   页码 134-146 doi: 10.1007/s11465-009-0033-x

摘要： When welding steel with aluminum, the appearance of intermetallic compounds of Fe and Al will decrease tenacity and increase rigidity, which leads to bad joint performance. A new type of low energy input (LEI) welding technology is introduced which can be used to weld steel with aluminum. Using the technology, brazing was located on the steel side and arc fusion welding on the aluminum side. The less heat input reduces the thickness of intermetallic compounds to 3-4 μm. Tensile strength tests prove that the joint breaks at the heat-affected zone and the strength is higher than 70% of the aluminum’s. Thus, the method can lead to a good performance joint.

关键词： joining of steel and aluminum     low energy input welding     arc welding     fusion welding – brazing    

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用于微电子机械系统封装的体硅键合技术和薄膜密封技术

王渭源,王跃林

《中国工程科学》 2002年 第4卷 第6期   页码 56-62

摘要：

对静电键合、体硅直接键合和界面层辅助键合等三种体硅键合技术，整片操作、局部操作和选择保护等三种密封技术，以及这些技术用于微电子机械系统的密封作了评述，强调在器件研究开始时应考虑封装问题，具体技术则应在保证器件功能和尽量减少芯片复杂性两者之间权衡决定。

关键词： 体硅键合技术     薄膜密封技术     微电子机械系统封装技术    

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Hyperbranched magnetic polymer: highly efficient removal of Cr(VI) and application in electroplating wastewater

《化学科学与工程前沿（英文）》 2023年 第17卷 第10期   页码 1568-1580 doi: 10.1007/s11705-023-2303-2

摘要： By using a two-step hydrothermal method and trithiocyanuric acid (TTCA), 2,4,6-trihydrazino-1,3,5-triazine (THT), and Fe3O4 as raw materials, a spherical magnetic adsorbent polymer (TTCA/THT@Fe3O4) was synthesized to achieve the efficient removal of Cr(VI) from wastewater. Under optimal adsorption conditions, the maximum adsorption capacity of TTCA/THT@Fe3O4 for Cr(VI) can reach 1340 mg∙g‒1. Notably, the removal efficiency can approach 98.9%, even at the lower concentration of 20 mg∙L‒1 Cr(VI). For actual wastewater containing Cr(VI), the Cr(VI) concentration was reduced from 25.8 to 0.4 mg∙L‒1, a remarkable 20% lower than the current industry discharge standard value. A mechanism for the high adsorption performance of Cr(VI) on TTCA/THT@Fe3O4 was investigated using Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and density functional theory. It can be plausibly attributed to the formation of Cr/N and Cr/S coordination bonds. Additionally, surface electrostatic adsorption, reduction effects, and the spherical polymer structure increase the contact area with Cr(VI), maximizing adsorption. The synergistic effect of adsorption and reduction enhances the adsorption performance of TTCA/THT@Fe3O4 for Cr(VI) and total chromium in water. The resultant polymer has a simple preparation process, excellent adsorption performance, easy magnetic separation, and promising application for actual wastewater.

关键词： magnetic polymer     chromium removal     hydrogen bonding     recyclability     actual wastewater    

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Evaluating the material strength from fracture angle under uniaxial loading

Jitang FAN

《结构与土木工程前沿（英文）》 2019年 第13卷 第2期   页码 288-293 doi: 10.1007/s11709-018-0480-8

摘要： The most common experimental methods of measuring material strength are the uniaxial compressive and tensile tests. Generally, shearing fracture model occurs in both the tests. Compressive strength is higher than tensile strength for a material. Shearing fracture angle is smaller than 45° under uniaxial compression and greater than 45° under uniaxial tension. In this work, a unified relation of material strength under uniaxial compression and tension is developed by correlating the shearing fracture angle in theory. This constitutive relation is quantitatively illustrated by a function for analyzing the material strength from shear fracture angle. A computational simulation is conducted to validate this theoretical function. It is full of interest to give a scientific illustration for designing the high-strength materials and engineering structures.

关键词： strength     fracture     mechanics    

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The effects of interfacial strength on fractured microcapsule

Luthfi Muhammad MAULUDIN, Chahmi OUCIF

《结构与土木工程前沿（英文）》 2019年 第13卷 第2期   页码 353-363 doi: 10.1007/s11709-018-0469-3

摘要： The effects of interfacial strength on fractured microcapsule are investigated numerically. The interaction between crack and microcapsule embedded in mortar matrix is modeled based on cohesive approach. The microcapsules are modelled with variation of core-shell thickness ratio and potential cracks are represented by pre-inserted cohesive elements along the element boundaries of the mortar matrix, microcapsules core, microcapsule shell, and at the interfaces between these phases. Special attention is given to the effects of cohesive fracture on the microcapsule interface, namely fracture strength, on the load carrying capacity and fracture probability of the microcapsule. The effect of fracture properties on microcapsule is found to be significant factor on the load carrying capacity and crack propagation characteristics. Regardless of core-shell thickness ratio of microcapsule, the load carrying capacity of self-healing material under tension increases as interfacial strength of microcapsule shell increases. In addition, given the fixed fracture strength of the interface of microcapsule shell, the higher the ratio core-shell thickness, the higher the probability of microcapsules being fractured.

关键词： interfacial strength     cohesive elements     microcapsule     core-shell thickness ratio     fracture properties    

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Effect of loading rate on shear strength parameters of mechanically and biologically treated waste

《环境科学与工程前沿（英文）》 2022年 第16卷 第12期 doi: 10.1007/s11783-022-1595-7

摘要：

● Mechanical behavior of MBT waste affected by loading rate was investigated.

关键词： Mechanically and biologically treated waste     Landfill     Triaxial test     Loading rate     Axial strain     Shear strength parameter    

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The strength–dilatancy characteristics embraced in hypoplasticity

Zhongzhi FU, Sihong LIU, Zijian WANG

《结构与土木工程前沿（英文）》 2013年 第7卷 第2期   页码 178-187 doi: 10.1007/s11709-013-0191-0

摘要： The strength-dilatancy characteristics of frictional materials embraced in the hypoplastic model proposed by Gudehus and Bauer are investigated and compared with the revised model suggested by Huang. In the latter the deviatoric stress in the model by Gudehus and Bauer is replaced by a transformed stress according to the stress transformation technique proposed by Matsuoka. The flow rule, the failure state surface equation and the strength-dilatancy relationship embraced in both models are derived analytically. The performance of the two hypoplastic models in reproducing the relationship between the peak strength and the corresponding dilation rate under triaxial compression, plane compression and plane shearing are then extensively investigated and compared with experimental results and with the predictions made by particular classical stress-dilatancy theories. Numerical investigations show that the performance in reproducing the strength-dilatancy relationship is quite satisfactory under triaxial compression stress state in both models and the predictions made by the transformed stress based model are closer to the results obtained from classical stress-dilatancy theories for plane compression and plane shearing problems.

关键词： strength     dilatancy     hypoplasticity     frictional materials    

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Slender reinforced concrete shear walls with high-strength concrete boundary elements

《结构与土木工程前沿（英文）》 2023年 第17卷 第1期   页码 138-151 doi: 10.1007/s11709-022-0897-y

摘要： Reinforced concrete structural walls are commonly used for resisting lateral forces in buildings. Owing to the advancements in the field of concrete materials over the past few decades, concrete mixes of high compressive strength, commonly referred to as high-strength concrete (HSC), have been developed. In this study, the effects of strategic placement of HSC on the performance of slender walls were examined. The finite-element model of a conventional normal-strength concrete (NSC) prototype wall was validated using test data available in extant studies. HSC was incorporated in the boundary elements of the wall to compare its performance with that of the conventional wall at different axial loads. Potential reductions in the reinforcement area and size of the boundary elements were investigated. The HSC wall exhibited improved strength and stiffness, and thereby, allowed reduction in the longitudinal reinforcement area and size of the boundary elements for the same strength of the conventional wall. Cold joints resulting from dissimilar concrete pours in the web and boundary elements of the HSC wall were modeled and their impact on behavior of the wall was examined.

关键词： slender walls     high-strength concrete     rectangular and barbell-shaped walls     cold joints    

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Performance of steel bridge deck pavement structure with ultra high performance concrete based on resin bonding

《结构与土木工程前沿（英文）》 2021年 第15卷 第4期   页码 895-904 doi: 10.1007/s11709-021-0759-z

摘要： This research investigated a pavement system on steel bridge decks that use epoxy resin (EP) bonded ultra-high performance concrete (UHPC). Through FEM analysis and static and dynamic bending fatigue tests of the composite structure, the influences of the interface of the pavement layer, reinforcement, and different paving materials on the structural performance were compared and analyzed. The results show that the resin bonded UHPC pavement structure can reduce the weld strain in the steel plate by about 32% and the relative deflection between ribs by about 52% under standard axial load conditions compared to traditional pavements. The EP bonding layer can nearly double the drawing strength of the pavement interface from 1.3 MPa, and improve the bending resistance of the UHPC structure on steel bridge decks by about 50%; the bending resistance of reinforced UHPC structures is twice that of unreinforced UHPC structure, and the dynamic deflection of the UHPC pavement structure increases exponentially with increasing fatigue load. The fatigue life is about 1.2 × 107 cycles under a fixed force of 9 kN and a dynamic deflection of 0.35 mm, which meets the requirements for fatigue performance of pavements on steel bridge decks under traffic conditions of large flow and heavy load.

关键词： steel bridge deck pavement     ultra-high-performance concrete     epoxy resin     composite structure     bending fatigue performance    

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标题 作者 时间 类型 操作

The electrostatic-alloy bonding technique used in MEMS

WANG Wei, CHEN Wei-ping

期刊论文

Ultraviolet exposure enhanced silicon direct bonding

Guanglan LIAO, Xuekun ZHANG, Xiaohui LIN, Canghai MA, Lei NIE, Tielin SHI,

期刊论文

Patterned wafer bonding using ultraviolet adhesive

Rui ZHUO, Guanglan LIAO, Wenliang LIU, Lei NIE, Tielin SHI

期刊论文

A space solar cell bonding robot

FU Zhuang, ZHAO Yan-zheng, LIU Ren-qiang, DONG Zhi

期刊论文

淀粉基API胶合木胶接结构破坏模式及失效机理

时君友,徐文彪,王淑敏

期刊论文

Towards Cr(VI)-free anodization of aluminum alloys for aerospace adhesive bonding applications: A review

Shoshan T. Abrahami, John M. M. de Kok, Herman Terryn, Johannes M. C. Mol

期刊论文

ARC welding method for bonding steel with aluminum

Zhenyang LU, Pengfei HUANG, Wenning GAO, Yan LI, Hanpeng ZHANG, Shuyan YIN

期刊论文

用于微电子机械系统封装的体硅键合技术和薄膜密封技术

王渭源,王跃林

期刊论文

Hyperbranched magnetic polymer: highly efficient removal of Cr(VI) and application in electroplating wastewater

期刊论文

Evaluating the material strength from fracture angle under uniaxial loading

Jitang FAN

期刊论文

The effects of interfacial strength on fractured microcapsule

Luthfi Muhammad MAULUDIN, Chahmi OUCIF

期刊论文

Effect of loading rate on shear strength parameters of mechanically and biologically treated waste

期刊论文

The strength–dilatancy characteristics embraced in hypoplasticity

Zhongzhi FU, Sihong LIU, Zijian WANG

期刊论文

Slender reinforced concrete shear walls with high-strength concrete boundary elements

期刊论文

Performance of steel bridge deck pavement structure with ultra high performance concrete based on resin bonding

期刊论文